Semiconductor Wafer Hot Plate > CM Division

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CM Division

A Company Shaping the Future through New - LOTCES

Business Overview

The CM Division provides precision heaters for various industries requiring precise temperature control, including Aluminum (Al) Heaters and Aluminum Nitride (AlN) Ceramic Heaters for semiconductor PHOTO processes with high precision and uniform temperature.
These heaters are also used in display, solar, and other industrial applications that require precise temperature regulation. Additionally, the division designs and manufactures specialized pumps, such as Bellows Pumps for transferring high-purity chemicals and fluids. It also provides Auto Gate Valves to prevent the inflow of byproducts into vacuum pumps during semiconductor and display manufacturing processes.
Furthermore, the division develops and supplies products incorporating Magnetic Fluid Seals, replacing traditional O-ring seals in various applications, such as robot joints and pumps, that require high or ultra-high vacuum. In addition, a dedicated team is organized to carry out OEM production, modifications, as well as repair and root cause analysis, ensuring that we accurately identify and address the needs of clients and provide them with optimal, customized solutions.

Product Overview

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  • Semiconductor Wafer Hot Plate

    1) Aluminum Heater
    2) Ceramic Heater (Aluminum Nitride (AlN) Heater)

    Details

    1) Aluminum Heater

    - The Mica Heater is a type of heater where the heating element is covered with a thin sheet of mica, providing uniform temperature distribution and high heating efficiency. It offers flexibility in the design of the internal heating element.


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    ■ Product Features

    ✓ Excellent thermal conductivity and uniform temperature distribution

    ✓ Precise temperature control

    ✓ Superior electrical insulation

    ✓ Flexible internal heating element design


    2) Ceramic Heater (Aluminum Nitride (AlN) Heater)

    - The AlN Heater features a heating element (AgPd Paste) printed on an Aluminum Nitride (AlN) Plate, offering excellent thermal conductivity, electrical insulation, and resistance to thermal shock. It operates at a maximum temperature of 250°C.



    ■ Product Features

    ✓ Excellent thermal conductivity and uniform temperature distribution

    ✓ Precise temperature control

    ✓ Superior electrical insulation

    ✓ Excellent resistance to thermal shock

    ✓ Easy maintenance and cost-effective



    ■ Product Specifications (Spec.)


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    ■ Applications

    #Semiconductor #Display #Solar Energy #Solar Cells #LED #LCD #Electronics Industry


    ■ Other Product Lines

    Elbow Heater / Insulation Heater

    LOTCES Co., Ltd. CEO : Kim Ho-sik Tel : +82-41-548-6540 Fax : +82-41-541-7540 Responsibility for personal information management : admin@lotces.com Head office : 1-20, Jigotjungang-ro, Osan-si, Gyeonggi-do, South Korea Branch : 62-5(Factory1) / 62-7(Factory2) Yeonamsan-ro, Eumbong-myeon, Asan-si, Chungcheongnam-do, South Korea

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