PM R&D

We are conducting research on environmentally-friendly CLEAN technologies and providing Plasma solutions to improve vacuum exhaust systems for industries such as semiconductors (Semi), FPD (Flat Panel Displays), and next-generation batteries.

Diversification of Plasma System Lineup

• Direct Plasma System
  [Vacuum / ATM]

  Direct connection within the process piping (Fore line) considering size and installation location
  Decomposition of unreacted sources and stabilization of process byproducts

  

  

• Remote Plasma System
  [Vacuum]

  Injection of reactive gases via remote method (considering byproduct characteristics and location)
  Gasification of process byproducts (treatment/removal)