Business Overview
The CM Division provides precision heaters for various industries requiring precise temperature control, including Aluminum (Al) Heaters and Aluminum Nitride (AlN) Ceramic Heaters for
semiconductor PHOTO processes with high precision and uniform temperature.
These heaters are also used in display, solar, and other industrial applications that require precise temperature regulation. Additionally, the division designs and manufactures specialized pumps, such as
Bellows Pumps for transferring high-purity chemicals and fluids. It also provides Auto Gate Valves to prevent the inflow of byproducts into vacuum pumps during semiconductor and display manufacturing processes.
Furthermore, the division develops and supplies products incorporating Magnetic Fluid Seals, replacing traditional O-ring seals in various applications, such as robot joints and pumps,
that require high or ultra-high vacuum. In addition, a dedicated team is organized to carry out OEM production, modifications, as well as repair and root cause analysis, ensuring that we accurately identify and
address the needs of clients and provide them with optimal, customized solutions.
Product Overview