Plasma Pre-treatment System – PPS Plus > PM Division

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PM Division

A Company Shaping the Future through New - LOTCES

Business Overview

The Plasma Division specializes in breaking down and neutralizing hazardous or environmentally harmful byproducts generated during semiconductor and display manufacturing processes. By utilizing plasma technology, we ensure safer emissions, enhancing workplace safety and operational stability.
Additionally, our solutions optimize pump usage cycles, contributing to improved semiconductor and display production yields and enhanced energy efficiency in manufacturing processes. We are committed to developing and producing innovative products that drive efficiency and sustainability in the industry.

Semiconductor Process Plasma Product Layout
PM_layout.jpg

Product Overview

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    • Plasma Pre-treatment System – PPS Plus

    Semiconductor & Display Process Byproduct Treatment System
    PFCs & Greenhouse Gas Purification System
    Exhaust Powder Removal System

    Details

    This system effectively decomposes and neutralizes toxic and flammable byproducts, including large amounts of unreacted precursor gases and powders.

    - Eliminates risks of heat generation and combustion & improves Pump MTBF

    - Uses ICP (Inductively Coupled Plasma) technology

    - Supports increased precursor volume with higher plasma density compared to CCP, improving decomposition efficiency


    ■ Technical Specifications

    - RF Power System: Max 12kW


    ■ Applicable Processes

    - High-K Dielectric Films : ZrO2, HfO2, Al2O3 TiO2

    - RD-TOX(HCDS+NH3), ACP3+LTO520, SnO2

    - IMP : e-HDPL

    - Etch : Poly, Oxide [PFCs removal]

    List

    LOTCES Co., Ltd. CEO : Kim Ho-sik Tel : +82-41-548-6540 Fax : +82-41-541-7540 Responsibility for personal information management : admin@lotces.com Head office : 1-20, Jigotjungang-ro, Osan-si, Gyeonggi-do, South Korea Branch : 62-5(Factory1) / 62-7(Factory2) Yeonamsan-ro, Eumbong-myeon, Asan-si, Chungcheongnam-do, South Korea

    Copyright © LOTCES. All Rights Reserved.