본문




Plasma Pre-treatment System – PPS Plus
PFCs & Greenhouse Gas Purification System
Exhaust Powder Removal System
Details
This system effectively decomposes and neutralizes toxic and flammable byproducts, including large amounts of unreacted precursor gases and powders.
- Eliminates risks of heat generation and combustion & improves Pump MTBF
- Uses ICP (Inductively Coupled Plasma) technology
- Supports increased precursor volume with higher plasma density compared to CCP, improving decomposition efficiency
■ Technical Specifications
- RF Power System: Max 12kW
■ Applicable Processes
- High-K Dielectric Films : ZrO2, HfO2, Al2O3 TiO2
- RD-TOX(HCDS+NH3), ACP3+LTO520, SnO2
- IMP : e-HDPL
- Etch : Poly, Oxide [PFCs removal]