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Plasma Pre-treatment System – PT series
Details
This system is designed to decompose and neutralize toxic and flammable components, including large amounts of unreacted precursor gases and powders generated during semiconductor and display manufacturing.
- Eliminates risks of heat generation and combustion & improves Pump MTBF (Mean Time Between Failures)
- Utilizes CCP (Capacitively Coupled Plasma) technology
■ Technical Specifications
- AC Power System : Max 5kW
■ Applicable Processes
- Diff : High-K dielectric film - ZrO2, HfO2, Al2O3, TiO2