Plasma Pre-treatment System – PT series > PM Division

본문 바로가기

PM Division

A Company Shaping the Future through New - LOTCES

Business Overview

The Plasma Division specializes in breaking down and neutralizing hazardous or environmentally harmful byproducts generated during semiconductor and display manufacturing processes. By utilizing plasma technology, we ensure safer emissions, enhancing workplace safety and operational stability.
Additionally, our solutions optimize pump usage cycles, contributing to improved semiconductor and display production yields and enhanced energy efficiency in manufacturing processes. We are committed to developing and producing innovative products that drive efficiency and sustainability in the industry.

Semiconductor Process Plasma Product Layout
PM_layout.jpg

Product Overview

본문

    • Plasma Pre-treatment System – PT series

    Semiconductor & Display Process Byproduct Treatment System

    Details

    This system is designed to decompose and neutralize toxic and flammable components, including large amounts of unreacted precursor gases and powders generated during semiconductor and display manufacturing.

    - Eliminates risks of heat generation and combustion & improves Pump MTBF (Mean Time Between Failures)

    - Utilizes CCP (Capacitively Coupled Plasma) technology


    ■ Technical Specifications

    - AC Power System : Max 5kW  


    ■ Applicable Processes

    - Diff : High-K dielectric film - ZrO2, HfO2, Al2O3, TiO2


    List

    LOTCES Co., Ltd. CEO : Kim Ho-sik Tel : +82-41-548-6540 Fax : +82-41-541-7540 Responsibility for personal information management : admin@lotces.com Head office : 1-20, Jigotjungang-ro, Osan-si, Gyeonggi-do, South Korea Branch : 62-5(Factory1) / 62-7(Factory2) Yeonamsan-ro, Eumbong-myeon, Asan-si, Chungcheongnam-do, South Korea

    Copyright © LOTCES. All Rights Reserved.